Inline colour measurement of vacuum coatings
Monitor coating colour and saturation directly during PVD or CVD vacuum processes. A colorSENSOR CFO system with specially developed CFS sensors performs continuous colour measurement in the vacuum chamber.
Monitor coating colour and saturation directly during PVD or CVD vacuum processes. A colorSENSOR CFO system with specially developed CFS sensors performs continuous colour measurement in the vacuum chamber.
Application challenge
Monitor coating colour and saturation directly during PVD or CVD vacuum processes.
Measurement conditions
The source reports the application conditions as pressure up to 10⁻⁵ mbar and temperature up to 600 °C; these are not catalog ratings absent a specific sensor variant.
Measurement method and system
A colorSENSOR CFO system with specially developed CFS sensors performs continuous colour measurement in the vacuum chamber.
Documented performance
- Application chamber pressure: up to 10⁻⁵ mbar (CFS sensors in vacuum-coating application)
- Application temperature: up to 600 °C (CFS sensors in vacuum-coating application)
- Colour repeatability: ΔE < 0.3 (colorSENSOR CFO with CFS sensors in this application)
- Measuring frequency: up to 30 kHz (colorSENSOR CFO with CFS sensors in this application)
System components named by the manufacturer
- colorSENSOR CFO
- CFS sensors
Result
The source reports repeatability ΔE < 0.3 and measuring frequency up to 30 kHz for this application.
The problem
Monitor coating colour and saturation directly during PVD or CVD vacuum processes.
Conditions
The source reports the application conditions as pressure up to 10⁻⁵ mbar and temperature up to 600 °C; these are not catalog ratings absent a specific sensor variant.
The method
A colorSENSOR CFO system with specially developed CFS sensors performs continuous colour measurement in the vacuum chamber.
The result
The source reports repeatability ΔE < 0.3 and measuring frequency up to 30 kHz for this application.