Skip to content

interferoMETER 5200-TH Interferometers

interferoMETER 5200-TH: sensors and measurement devices by Micro-Epsilon for interferometers.

This series on the Micro-Epsilon site (opens in a new tab)

Models in the series

One column per model: what differs between the models of the series.

Models of interferoMETER 5200-TH compared by parameter
Parameter IMS5200-TH26 eli-m-e69ae355d3de75f91085de0a IMS5200-TH26/VAC eli-m-03efc2084d9c8095b7aec985 IMS5200MP-TH26 eli-m-e69d0c07f4428aa651750ec9
interface_specification 4-20mA RS422 / RS485 RS422 / RS485
quantity_specification 1-100 µm documented material-thickness interval 1-100 µm documented material-thickness interval 1-100 µm documented material-thickness interval
Accuracy 0.1 µm 0.1 µm 0.1 µm
source_sampling_rate_basis IMS5200-TH controller IMS5200-TH controller IMS5200MP-TH controller
Protection class (DIN EN 60529) ip40 ip40 ip40
Interfaces ethercat ethernet ethercat
Thickness measuring range 1–100 µm 1–100 µm 1–100 µm
Working distance 24–24.099 mm 24–24.099 mm 24–24.099 mm
Contact Non-contact Non-contact Non-contact
ADC sampling rate 24000 samples/s 24000 samples/s 24000 samples/s
Status Active Active Active

The industries we serve

Frequently asked questions

Answers to the most common questions about our products and services

Measuring thin transparent layers.

1–100 µm; check material and configuration.

Up to 24 kHz; this does not establish uniform accuracy at every setting.

Yes, Multi-Peak measurement of up to five layers.

Through its web interface. Check vacuum suitability for the selected components.

Didn't find the answer you were looking for?

Talk to an expert

More information

Get a quote or advice

Tell us what you need and an engineer will come back to you.

Request a quote for this product
What would you like to ask for?

Email or phone — one of them is enough

Email or phone — one of them is enough

0 of 500 words