interferoMETER 5200-TH Interferometers
interferoMETER 5200-TH: sensors and measurement devices by Micro-Epsilon for interferometers.
This series on the Micro-Epsilon site (opens in a new tab)
Models in the series
One column per model: what differs between the models of the series.
| Parameter | IMS5200-TH26 eli-m-e69ae355d3de75f91085de0a | IMS5200-TH26/VAC eli-m-03efc2084d9c8095b7aec985 | IMS5200MP-TH26 eli-m-e69d0c07f4428aa651750ec9 |
|---|---|---|---|
| interface_specification | 4-20mA | RS422 / RS485 | RS422 / RS485 |
| quantity_specification | 1-100 µm documented material-thickness interval | 1-100 µm documented material-thickness interval | 1-100 µm documented material-thickness interval |
| Accuracy | 0.1 µm | 0.1 µm | 0.1 µm |
| source_sampling_rate_basis | IMS5200-TH controller | IMS5200-TH controller | IMS5200MP-TH controller |
| Protection class (DIN EN 60529) | ip40 | ip40 | ip40 |
| Interfaces | ethercat | ethernet | ethercat |
| Thickness measuring range | 1–100 µm | 1–100 µm | 1–100 µm |
| Working distance | 24–24.099 mm | 24–24.099 mm | 24–24.099 mm |
| Contact | Non-contact | Non-contact | Non-contact |
| ADC sampling rate | 24000 samples/s | 24000 samples/s | 24000 samples/s |
| Status | Active | Active | Active |
The industries we serve
Frequently asked questions
Answers to the most common questions about our products and services
Measuring thin transparent layers.
1–100 µm; check material and configuration.
Up to 24 kHz; this does not establish uniform accuracy at every setting.
Yes, Multi-Peak measurement of up to five layers.
Through its web interface. Check vacuum suitability for the selected components.
Get a quote or advice
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