interferoMETER 5400-TH Interferometers
interferoMETER 5400-TH: sensors and measurement devices by Micro-Epsilon for interferometers.
Download the datasheet (opens in a new tab) This series on the Micro-Epsilon site (opens in a new tab)
Shared technical specifications for the series
Properties every model in the series has. What differs is in the models table below.
Range across models
The span covered by the models of the series together — not the range of each model.
| Accuracy | 0.1–0.2 µm |
|---|---|
| Working distance | 45–71.365 mm |
Models in the series
One column per model: what differs between the models of the series.
| Parameter | IMS5400-TH45 eli-m-93c2adb9c85ea6a8a432c54b | IMS5400-TH45/VAC eli-m-fa48fad2f580b1b3d8dfa9bc | IMS5400-TH70 eli-m-7a921f8cdb045dd56bbc870a | IMS5400MP-TH45 eli-m-0149f420b3e9e95cdafe96ee | IMS5400MP-TH45/VAC eli-m-44be0424d32cd7d7ead3dd6d | IMS5400MP-TH70 eli-m-b090223a3096d52c4d11d7fb |
|---|---|---|---|---|---|---|
| Accuracy | 0.1 µm | 0.1 µm | 0.2 µm | 0.1 µm | 0.1 µm | 0.2 µm |
| Operating temperature | 5–70 °C | 5–70 °C | 5–70 °C | 5–70 °C | 5–70 °C | 5–70 °C |
| Interfaces | ethernet | ethernet | ethercat | ethercat | ethernet | ethernet |
| interface_specification | RS422 / RS485 | Analog 0-10V | RS422 / RS485 | Analog 0-10V | Analog 0-10V | Analog 0-10V |
| quantity_specification | 35-1400 µm documented material-thickness interval | 35-1400 µm documented material-thickness interval | 35-1400 µm documented material-thickness interval | 35-1400 µm documented material-thickness interval | 35-1400 µm documented material-thickness interval | 35-1400 µm documented material-thickness interval |
| Protection class (DIN EN 60529) | ip40 | ip40 | ip40 | ip40 | ip40 | ip40 |
| source_sampling_rate_basis | IMS5400-TH controller | IMS5400-TH controller | IMS5400-TH controller | IMS5400MP-TH controller | IMS5400MP-TH controller | IMS5400MP-TH controller |
| Working distance | 45–46.365 mm | 45–46.365 mm | 70–71.36499999999999 mm | 45–46.365 mm | 45–46.365 mm | 70–71.36499999999999 mm |
| Thickness measuring range | 35–1400 µm | 35–1400 µm | 35–1400 µm | 35–1400 µm | 35–1400 µm | 35–1400 µm |
| Contact | Non-contact | Non-contact | Non-contact | Non-contact | Non-contact | Non-contact |
| ADC sampling rate | 6000 samples/s | 6000 samples/s | 6000 samples/s | 6000 samples/s | 6000 samples/s | 6000 samples/s |
| Status | Active | Active | Active | Active | Active | Active |
| Datasheet | PDF — IMS5400-TH45 (opens in a new tab) | PDF — IMS5400-TH45/VAC (opens in a new tab) | PDF — IMS5400-TH70 (opens in a new tab) | PDF — IMS5400MP-TH45 (opens in a new tab) | PDF — IMS5400MP-TH45/VAC (opens in a new tab) | PDF — IMS5400MP-TH70 (opens in a new tab) |
The industries we serve
Frequently asked questions
Answers to the most common questions about our products and services
TH is intended for transparent-material thickness and air gaps. Permitted target movement and working distance are separate from the thickness range.
No. The specified range is 35–1400 µm at refractive index 1.5, versus 50–2100 µm for air at approximately 1. Specify material and refractive index.
The standard version specifies one layer; IMS5400MP-TH supports up to five. Multi-Peak is not a feature of every TH controller.
No. The controller table specifies <±100 nm for TH45/TH45-VAC and <±200 nm for TH70 under its stated test conditions.
Resolution is specified at 0.5 kHz with a 64-value moving average and particular temperature/target conditions. The 6 kHz maximum rate is separate.
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