Skip to content

interferoMETER 5400-TH Interferometers

interferoMETER 5400-TH: sensors and measurement devices by Micro-Epsilon for interferometers.

Download the datasheet (opens in a new tab) This series on the Micro-Epsilon site (opens in a new tab)

Shared technical specifications for the series

Properties every model in the series has. What differs is in the models table below.

Range across models

The span covered by the models of the series together — not the range of each model.

Range across the models of interferoMETER 5400-TH
Accuracy 0.1–0.2 µm
Working distance 45–71.365 mm

Models in the series

One column per model: what differs between the models of the series.

Models of interferoMETER 5400-TH compared by parameter
Parameter IMS5400-TH45 eli-m-93c2adb9c85ea6a8a432c54b IMS5400-TH45/VAC eli-m-fa48fad2f580b1b3d8dfa9bc IMS5400-TH70 eli-m-7a921f8cdb045dd56bbc870a IMS5400MP-TH45 eli-m-0149f420b3e9e95cdafe96ee IMS5400MP-TH45/VAC eli-m-44be0424d32cd7d7ead3dd6d IMS5400MP-TH70 eli-m-b090223a3096d52c4d11d7fb
Accuracy 0.1 µm 0.1 µm 0.2 µm 0.1 µm 0.1 µm 0.2 µm
Operating temperature 5–70 °C 5–70 °C 5–70 °C 5–70 °C 5–70 °C 5–70 °C
Interfaces ethernet ethernet ethercat ethercat ethernet ethernet
interface_specification RS422 / RS485 Analog 0-10V RS422 / RS485 Analog 0-10V Analog 0-10V Analog 0-10V
quantity_specification 35-1400 µm documented material-thickness interval 35-1400 µm documented material-thickness interval 35-1400 µm documented material-thickness interval 35-1400 µm documented material-thickness interval 35-1400 µm documented material-thickness interval 35-1400 µm documented material-thickness interval
Protection class (DIN EN 60529) ip40 ip40 ip40 ip40 ip40 ip40
source_sampling_rate_basis IMS5400-TH controller IMS5400-TH controller IMS5400-TH controller IMS5400MP-TH controller IMS5400MP-TH controller IMS5400MP-TH controller
Working distance 45–46.365 mm 45–46.365 mm 70–71.36499999999999 mm 45–46.365 mm 45–46.365 mm 70–71.36499999999999 mm
Thickness measuring range 35–1400 µm 35–1400 µm 35–1400 µm 35–1400 µm 35–1400 µm 35–1400 µm
Contact Non-contact Non-contact Non-contact Non-contact Non-contact Non-contact
ADC sampling rate 6000 samples/s 6000 samples/s 6000 samples/s 6000 samples/s 6000 samples/s 6000 samples/s
Status Active Active Active Active Active Active
Datasheet PDF — IMS5400-TH45 (opens in a new tab) PDF — IMS5400-TH45/VAC (opens in a new tab) PDF — IMS5400-TH70 (opens in a new tab) PDF — IMS5400MP-TH45 (opens in a new tab) PDF — IMS5400MP-TH45/VAC (opens in a new tab) PDF — IMS5400MP-TH70 (opens in a new tab)

The industries we serve

Frequently asked questions

Answers to the most common questions about our products and services

TH is intended for transparent-material thickness and air gaps. Permitted target movement and working distance are separate from the thickness range.

No. The specified range is 35–1400 µm at refractive index 1.5, versus 50–2100 µm for air at approximately 1. Specify material and refractive index.

The standard version specifies one layer; IMS5400MP-TH supports up to five. Multi-Peak is not a feature of every TH controller.

No. The controller table specifies <±100 nm for TH45/TH45-VAC and <±200 nm for TH70 under its stated test conditions.

Resolution is specified at 0.5 kHz with a 64-value moving average and particular temperature/target conditions. The 6 kHz maximum rate is separate.

Didn't find the answer you were looking for?

Talk to an expert

More information

Get a quote or advice

Tell us what you need and an engineer will come back to you.

Request a quote for this product
What would you like to ask for?

Email or phone — one of them is enough

Email or phone — one of them is enough

0 of 500 words