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interferoMETER 5400 Interferometers

interferoMETER 5400: sensors and measurement devices by Micro-Epsilon for interferometers.

Download the datasheet (opens in a new tab) This series on the Micro-Epsilon site (opens in a new tab)

Models in the series

One column per model: what differs between the models of the series.

Models of interferoMETER 5400 compared by parameter
Parameter IMS5400-DS eli-m-61799845d7bd515b7c9bf6b0
Measuring rate 6000 Hz
Protection class (DIN EN 60529) ip40
Interfaces ethercat
interface_specification Analog 0-10V
Resolution 0.001 µm
rate_interval 100–6000 Hz
Operating temperature 5–70 °C
Working distance 19–150 mm
Linearity 0.05 µm
Contact Non-contact
Status Active
Datasheet PDF — IMS5400-DS (opens in a new tab)

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Frequently asked questions

Answers to the most common questions about our products and services

DS measures distance; TH measures thickness. Choose the measurand first, then head, working distance and model range.

Yes. Converting optical path difference to thickness depends on refractive index. A glass range is not the same range in air or another material.

No. For example, 5400MP-DS evaluates multiple distances, while 5400MP-TH specifies up to five layers. Use the relevant configuration definition.

Optical head, suitable fiber and controller, plus power and data connections. Vacuum versions need dedicated optical components; some protocols need adapters.

No. Also check linearity, material, working distance, rate, averaging and environment. A moving-average resolution is not unconditional maximum-rate performance.

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