interferoMETER 5420-TH Interferometers
interferoMETER 5420-TH: sensors and measurement devices by Micro-Epsilon for interferometers.
Download the datasheet (opens in a new tab) This series on the Micro-Epsilon site (opens in a new tab)
Models in the series
One column per model: what differs between the models of the series.
| Parameter | IMS5420-TH eli-m-1717be0736a20120070ab740 | IMS5420IP67-TH eli-m-266e4234f52df4e5190eed74 | IMS5420IP67MP-TH eli-m-da53372092fd6995a4f93516 | IMS5420MP-TH eli-m-69fb714700dcddabcbee9b3b |
|---|---|---|---|---|
| Thickness measuring range | 50–1050 µm | 50–1050 µm | 50–1050 µm | 50–1050 µm |
| Working distance | 21–22 mm | 21–22 mm | 21–22 mm | 21–22 mm |
| interface_specification | RS422 / RS485 | Analog 0-10V | Digital I/O | RS422 / RS485 |
| Protection class (DIN EN 60529) | ip40 | ip40 | ip40 | ip40 |
| source_sampling_rate_basis | IMS5420-TH controller | IMS5420IP67-TH controller | IMS5420IP67MP-TH controller | IMS5420MP-TH controller |
| Interfaces | rs422 | rs422 | ethercat | profinet |
| rate_interval | 100–6000 Hz | Not specified | Not specified | Not specified |
| Resolution | 0.001 µm | Not specified | Not specified | Not specified |
| Measuring rate | 6000 Hz | Not specified | Not specified | Not specified |
| quantity_specification | 50-1050 µm documented material-thickness interval | 50-1050 µm documented material-thickness interval | 50-1050 µm documented material-thickness interval | 50-1050 µm documented material-thickness interval |
| Linearity | 0.1 µm | 0.1 µm | Not specified | Not specified |
| Contact | Non-contact | Non-contact | Non-contact | Non-contact |
| Accuracy | 0.1 µm | 0.1 µm | 0.1 µm | 0.1 µm |
| ADC sampling rate | 6000 samples/s | 6000 samples/s | 6000 samples/s | 6000 samples/s |
| Status | Active | Active | Active | Active |
| Datasheet | PDF — IMS5420-TH (opens in a new tab) | PDF — IMS5420IP67-TH (opens in a new tab) | PDF — IMS5420IP67MP-TH (opens in a new tab) | PDF — IMS5420MP-TH (opens in a new tab) |
The industries we serve
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Aerospace
- Aircraft door-lock position detection
- Airlines & Aerospace Our balancing machines and moment weighing scales for aerospace drives ensure maximum precision, ease of use, and modular flexibility delivering reliability and performance without compromise contributing to your economic success.
- Automatic balancing machines Automatic balancing machines from Schenck are advanced solutions for precise balancing of rotating components in automated production processes. We offer systems and stations for balancing crankshafts, wheels and tires, turbochargers, electric armatures, drives, axle drive units, torque converters, drive shafts, disc-shaped rotors, as well as fans. Our systems increase productivity, ensure consistent quality, and are tailored to the needs of the automotive, energy, and industrial sectors.
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Medical industry
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Environment
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Electric motor manufacturing
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Food industry
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Automotive industry
- Airlines & Aerospace Our balancing machines and moment weighing scales for aerospace drives ensure maximum precision, ease of use, and modular flexibility delivering reliability and performance without compromise contributing to your economic success.
- Automatic balancing machines Automatic balancing machines from Schenck are advanced solutions for precise balancing of rotating components in automated production processes. We offer systems and stations for balancing crankshafts, wheels and tires, turbochargers, electric armatures, drives, axle drive units, torque converters, drive shafts, disc-shaped rotors, as well as fans. Our systems increase productivity, ensure consistent quality, and are tailored to the needs of the automotive, energy, and industrial sectors.
- Axle Drives With our balancing machines for front and rear axle transmissions, the measured unbalance is corrected by drilling into the drive flanges of the transmissions (welding optional). We support you with our interdisciplinary expertise in the production of front and rear axle transmissions from the initial idea to the design stage through to series production.
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Industrial automation
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Plastics
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Optics
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3D printing
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Battery manufacturing
Frequently asked questions
Answers to the most common questions about our products and services
It measures silicon-wafer thickness and suitable materials transparent around 1100 nm, including semiconductor applications. Material suitability depends on the configuration.
It is the documented range at refractive index 3.82, but the footnote states measurable thickness depends on doping. Check the wafer and conditions.
No. Housing, fiber/electrical connections and interfaces differ. The IP67 table does not include the standard version’s analog output or synchronization inputs.
No. Standard versions need a module for PROFINET and EtherNet/IP; IP67 versions also list EtherCAT as optional through a module.
IMP TH24 has a 24±3 mm working distance; silicon thickness range is 0.05–1.05 mm under specified conditions. They are separate selection dimensions.
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