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IMS5600-DS0.5/90/VAC

From the interferoMETER 5600-DS series

interferoMETER 5600-DS: sensors and measurement devices by Micro-Epsilon for interferometers.

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Technical specification

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Technical specification for IMS5600-DS0.5/90/VAC
Working distance 0.5–2 mm
Resolution 3e-05 µm
Interfaces ethernet
interface_specification Digital I/O
Operating temperature 5–70 °C
Protection class (DIN EN 60529) ip40
quantity_specification 0-1.5 mm model-level measuring interval
Accuracy 0.01 µm
interface_specification 4-20mA
interface_specification Analog 0-10V
interface_specification RS422 / RS485
source_sampling_rate_basis IMS5600-DS controller
Interfaces ethercat
source_linearity_basis Official interferoMETER 5600-DS linearity +/-10 nm; 30 pm resolution is stored separately and is not substituted for linearity.
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