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interferoMETER 5600-DS Interferometers

interferoMETER 5600-DS: sensors and measurement devices by Micro-Epsilon for interferometers.

Download the datasheet (opens in a new tab) This series on the Micro-Epsilon site (opens in a new tab)

Shared technical specifications for the series

Properties every model in the series has. What differs is in the models table below.

Range across models

The span covered by the models of the series together — not the range of each model.

Range across the models of interferoMETER 5600-DS
Working distance 0.5–21.1 mm

Models in the series

One column per model: what differs between the models of the series.

Models of interferoMETER 5600-DS compared by parameter
Parameter IMS5600-DS0.5/90/VAC eli-m-ddede17f797f77edfb4f775e IMS5600-DS1/VAC eli-m-1fec80b0807733b8bdc64399 IMS5600-DS10/90/VAC eli-m-e735e745d1cd12bc00cdd072 IMS5600-DS19 eli-m-69a231929f0317fae0258800 IMS5600-DS19/VAC eli-m-b656f932344605cce3af705a IMS5600MP-DS19 eli-m-286b4458b1d603a890c4c310 IMS5600MP-DS19/VAC eli-m-f459ab5fc4fae2b03cf74d1e
interface_specification Digital I/O Digital I/O RS422 / RS485 4-20mA Digital I/O 4-20mA Analog 0-10V
quantity_specification 0-1.5 mm model-level measuring interval 0-1 mm model-level measuring interval 0-1.5 mm model-level measuring interval 0-2.1 mm model-level measuring interval 0-2.1 mm model-level measuring interval 0-2.1 mm model-level measuring interval 0-2.1 mm model-level measuring interval
Accuracy 0.01 µm 0.01 µm 0.01 µm 0.01 µm 0.01 µm 0.01 µm 0.01 µm
Operating temperature 5–70 °C 5–70 °C 5–70 °C 5–70 °C 5–70 °C 5–70 °C 5–70 °C
Protection class (DIN EN 60529) ip40 ip40 ip40 ip40 ip40 ip40 ip40
Interfaces ethernet ethernet ethercat ethernet ethercat ethercat ethercat
source_sampling_rate_basis IMS5600-DS controller IMS5600-DS controller IMS5600-DS controller IMS5600-DS controller IMS5600-DS controller IMS5600MP-DS controller IMS5600MP-DS controller
source_linearity_basis Official interferoMETER 5600-DS linearity +/-10 nm; 30 pm resolution is stored separately and is not substituted for linearity. Official interferoMETER 5600-DS linearity +/-10 nm; 30 pm resolution is stored separately and is not substituted for linearity. Official interferoMETER 5600-DS linearity +/-10 nm; 30 pm resolution is stored separately and is not substituted for linearity. Official interferoMETER 5600-DS linearity +/-10 nm; 30 pm resolution is stored separately and is not substituted for linearity. Official interferoMETER 5600-DS linearity +/-10 nm; 30 pm resolution is stored separately and is not substituted for linearity. Official interferoMETER 5600-DS linearity +/-10 nm; 30 pm resolution is stored separately and is not substituted for linearity. Official interferoMETER 5600-DS linearity +/-10 nm; 30 pm resolution is stored separately and is not substituted for linearity.
Resolution 3e-05 µm 3e-05 µm 3e-05 µm 3e-05 µm 3e-05 µm 3e-05 µm 3e-05 µm
Working distance 0.5–2 mm 1–2 mm 10–11.5 mm 19–21.1 mm 19–21.1 mm 19–21.1 mm 19–21.1 mm
Contact Non-contact Non-contact Non-contact Non-contact Non-contact Non-contact Non-contact
ADC sampling rate 6000 samples/s 6000 samples/s 6000 samples/s 6000 samples/s 6000 samples/s 6000 samples/s 6000 samples/s
Status Active Active Active Active Active Active Active
Datasheet PDF — IMS5600-DS0.5/90/VAC (opens in a new tab) PDF — IMS5600-DS1/VAC (opens in a new tab) PDF — IMS5600-DS10/90/VAC (opens in a new tab) PDF — IMS5600-DS19 (opens in a new tab) PDF — IMS5600-DS19/VAC (opens in a new tab) PDF — IMS5600MP-DS19 (opens in a new tab) PDF — IMS5600MP-DS19/VAC (opens in a new tab)

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Frequently asked questions

Answers to the most common questions about our products and services

Yes. It is designed for absolute distance measurement, including step profiles. Its output is not merely displacement relative to an initial position.

The footnote specifies 0.5 kHz, a 64-value moving average, stable temperature and differential glass measurement at mid-range. It is not an unconditional 6 kHz resolution.

No. The MP table distinguishes <±10 nm for the first distance from <±100 nm for each additional distance.

The footnote identifies PROFINET and EtherNet/IP as optional connections through an interface module. Ethernet, EtherCAT and RS422 are listed separately.

Select dedicated head, fiber and vacuum feedthroughs. UHV-compatible optical components do not make the controller vacuum-rated; the tabulated controller is IP40.

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